Lead Scan Semiconductors
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Bottom 2D/3D Vision Module

Performs bottom-side dimensional measurement and defect inspection of ICs, including but not limited to ball coplanarity, ball/pin/pad size, pin pitch, missing, extra, broken, or off-center balls, and passive component defects.
Defect Images

Technical Parameters


  • FOV
    60mm × 60 mm ( 2.36in. × 2.36in.)
  • XY Lateral Resolution
    12 μm
  • Pixels Per FOV
    5120 × 5120
  • 3D Sensor Height Resolution
    < 0.2 μm
  • Repeatability
    4 μm ( 3 σ )
  • Accuracy
    ± 3 μm
  • Minimum Feature Diameter
    110 μm
  • Measurement Range
    ± 1 mm
  • 3D Acquisition Time (Dwell), Typical
    300 msec
  • Maximum Allowable Motion during Acquisition
    3 μm
  • L × W × H
    423.4mm × 423.4mm × 691mm
  • Weight
    ≈ 31 kg