Lead Scan Semiconductors
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Top 3D Vision Module

Performs IC top-side dimensional measurement and defect inspection, including solder ball coplanarity, solder ball / pad size, lead (pin) pitch, missing / excess / damaged / shifted solder balls and missing or defective components.
Defect Images

Technical Parameters


  • FOV
    26mm × 26 mm
  • XY Lateral Resolution
    11 μm
  • Pixels Per FOV
    5120 × 5120
  • 3D Sensor Height Resolution
    0.3 μm
  • Repeatability
    4 μm ( 3 σ )
  • Accuracy
    ± 3 μm
  • Minimum Feature Diameter
    110 μm
  • Measurement Range
    5 mm
  • 3D Acquisition Time (Dwell), Typical
    400 msec
  • Maximum Allowable Motion during Acquisition
    3 μm
  • L × W × H
    350mm × 450mm × 350mm
  • Weight
    ≈ 9 kg